Ultrasonic assisted supercritical electroplating system

This invention relates to an ultrasonic assisted supercritical electroplating system. The characteristic of the device is to use an ultrasonic oscillating bath to agitate the plating solution in the container under the supercritical environment and to perform the electroplating process. Ultrasonic o...

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Bibliographische Detailangaben
Hauptverfasser: CHUANG, HOIAO, WU, GUAN-LIN, YANG, HSI-MIN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:This invention relates to an ultrasonic assisted supercritical electroplating system. The characteristic of the device is to use an ultrasonic oscillating bath to agitate the plating solution in the container under the supercritical environment and to perform the electroplating process. Ultrasonic oscillating bath is made of corrosion-resistant metal into a cup-like container filled with electroplating solution. Before attaching the oscillating plate at the bottom of bath, an electrical insulation plate is first affixed to the bottom of the bath, to prevent the metal and the oscillating plate from direct contacting. It is to avoid the electrical current conducting to the plating solution during the oscillation, which affects the plating process. In addition, a PE (polyethylene) plastic ring is used as a bracket to prevent the oscillating plate to contact the bottom of the bath, and reserved some space for heat dissipation. Therefore, an ultrasonic assisted supercritical electroplating system is completed. Mor