Semiconductor drying apparatus
The present utility model provides a semiconductor drying apparatus, which includes a drying tank, a liquid storage tank, and a circulation piping system connected between the drying tank and the liquid storage tank and including a first filter. When the semiconductor drying liquid is stored in the...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The present utility model provides a semiconductor drying apparatus, which includes a drying tank, a liquid storage tank, and a circulation piping system connected between the drying tank and the liquid storage tank and including a first filter. When the semiconductor drying liquid is stored in the liquid storage tank, the cleaning and drying liquid is outputted from the liquid storage tank through the circulation piping system, and passes through the first filter to return to the liquid storage tank, whereby a quantity of microparticles in the drying liquid can be always kept under a permissible quantity. |
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