Multi-beam interferometric displacement measurement system utilized in the large measuring range

This interferometric system is a multi-beam displacement measurement interferometer which can be used in the large measuring range. The system consists a light source module, a resonator module and a detector system. The light source module which includes laser light source and a polarizer can bring...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: CHANG, CHUNG-PING, SHYU, LIH-HORNG, TUNG, PING, WANG, YUNGNG
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:This interferometric system is a multi-beam displacement measurement interferometer which can be used in the large measuring range. The system consists a light source module, a resonator module and a detector system. The light source module which includes laser light source and a polarizer can bring the polarizing laser source; a resonator module which contains a coated glass plate, a one-eight wave plate and a corner cube is combined with the light source and acquires two types of the polarization beam. And the detector system involves a second polarization beam splitter and two photodiodes. They gain the interference signals from the resonator. By the above method, the resolution and measuring range will be improved. Besides, the system is independent of the tile angle effect.