Probe,probe card and method for manufacturing probe
A probe comprises a first metal part (N) and a plate-shaped second metal part (K). The second metal part (K) is embedded in one end of the first metal part (K) in the longitudinal direction (X) thereof in a predetermined range, protrudes from the first metal part (N) in the longitudinal direction (X...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A probe comprises a first metal part (N) and a plate-shaped second metal part (K). The second metal part (K) is embedded in one end of the first metal part (K) in the longitudinal direction (X) thereof in a predetermined range, protrudes from the first metal part (N) in the longitudinal direction (X), and has a contact section (20c) that makes contact with an electrode of a semiconductor device. A cross-section of the contact section (20c) perpendicular to the longitudinal direction (X) is circular, and a cross-section perpendicular to the longitudinal direction (X) of the end section of the second metal part (K) on the opposite side to the contact section (20c) is rectangular. |
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