TWI855540B

Provided is a technology comprising: a first container moving unit capable of moving a container; a second container moving unit disposed in a different position to the first container moving unit and capable of moving the container; a plurality of process modules capable of processing a substrate in the container; a substrate conveying unit which is disposed between the first container moving unit and the second container moving unit and is configured to be capable of communicating with the plurality of process modules, and which is capable of conveying the substrate; a substrate conveying robot provided in the substrate conveying unit and capable of conveying the substrate to the process modules; a third container moving unit disposed between the first container moving unit and the second container moving unit, and capable of moving the container from the first container moving unit to the second container moving unit; and a control unit.