TWI855425B

The invention provides a supply device and a film forming device which can inhibit the supply of more than a specified amount of electronic components and improve productivity. A supply device according to an embodiment includes: a chute having a plurality of chute holes through which electronic com...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MATSUHASHI, RYO, SHIRAKAWA, YOSHIHIRO, KUBOTA, SHOTA, IKEDO, MITSURU
Format: Patent
Sprache:chi
Schlagworte:
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Beschreibung
Zusammenfassung:The invention provides a supply device and a film forming device which can inhibit the supply of more than a specified amount of electronic components and improve productivity. A supply device according to an embodiment includes: a chute having a plurality of chute holes through which electronic components having one end and the other end can pass one by one; a mask having a mask hole which overlaps the chute, into which the electronic component is inserted through the chute hole, and which covers a part of the electronic component; a holder that holds the mask and is in contact with one end of the electronic component inserted into the mask hole; a moving mechanism that moves the chute and the mask relative to each other such that the axis of the chute hole is offset from the axis of the mask hole in a state in which the other end of the electronic component inserted into the mask hole does not interfere with the chute; and a removal mechanism that removes the electronic component other than the electronic c