Long life laser chamber electrode

Disclosed is an apparatus and method for creating a protective layer on at least one electrode in a laser chamber in which a layer-forming gas is added to the laser chamber and then the electrode is used to generate a plasma in the laser chamber causing formation of the protective layer.

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Bibliographische Detailangaben
1. Verfasser:	EFFENBERGER, ANDREW JAY JR
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DEVICES USING STIMULATED EMISSION DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Disclosed is an apparatus and method for creating a protective layer on at least one electrode in a laser chamber in which a layer-forming gas is added to the laser chamber and then the electrode is used to generate a plasma in the laser chamber causing formation of the protective layer.