TWI854103B

A storage shelf (1) includes: a main frame (10); a plurality of shelf modules (40) each having a base plate (41) detachably provided on the main frame (10), and a supply nozzle (51) provided on the base plate (41); a main pipe (61) through which purge gas supplied from a supply source flows, and a first branch (62) that is provided in the main pipe (61) and branches a flow path from the main pipe (61), in which the shelf modules (40) are each provided with a mass flow controller (55) configured to adjust the flow rate of the purge gas supplied to the supply nozzle (51), the first branch (62) is connected to a module pipe (63) via an open/close valve (64) for opening/closing the flow path, and the mass flow controller (55) is connected to the module pipe (63).