3D MEMORY DEVICE AND METHOD FOR FORMING THE SAME

In some embodiments, the present disclosure relates to a 3D memory device, including a plurality of gate lines interleaved between a plurality of dielectric layers in a vertical direction, the plurality of gate lines forming recesses between the plurality of dielectric layers; a source/drain line di...

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Bibliographische Detailangaben
Hauptverfasser: LIN, CHUNG-TE, LIAO, SONG-FU, CHEN, HAIING, CHIANG, KUOANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:In some embodiments, the present disclosure relates to a 3D memory device, including a plurality of gate lines interleaved between a plurality of dielectric layers in a vertical direction, the plurality of gate lines forming recesses between the plurality of dielectric layers; a source/drain line disposed next to the plurality of dielectric layers, spaced from the plurality of gate lines by the recesses in a lateral direction; a ferroelectric film arranged laterally between sidewalls of the plurality of gate lines and the source/drain line and confined within the recesses; and a semiconductor film disposed within the recesses and spacing the ferroelectric film from the source/drain line.