TWI852145B

A writing apparatus irradiates a predetermined position on an irradiation target with multiple charged particle beams to write a predetermined pattern on the irradiation target. The writing apparatus includes a beam generation mechanism generating multiple charged particle beams; a blanking aperture...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAKAYAMA, TAKAHITO, NAKAHASHI, SATOSHI, FUJISAKI, EITA
Format:	Patent
Sprache:	chi
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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