TWI851869B

A method of manufacturing a bonded body includes a preparation step of interposing a sealing material containing glass between a highly thermal conductive substrate and a glass substrate, and a bonding step of forming a sealing layer by irradiating the sealing material with laser light. The bonding...

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Bibliographische Detailangaben
1. Verfasser:	SHIRAGAMI, TORU
Format:	Patent
Sprache:	chi
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	A method of manufacturing a bonded body includes a preparation step of interposing a sealing material containing glass between a highly thermal conductive substrate and a glass substrate, and a bonding step of forming a sealing layer by irradiating the sealing material with laser light. The bonding step includes a first heating step of preheating the sealing material at a temperature lower than a softening point of the sealing material or a temperature at which the sealing material is prevented from softening and flowing by irradiation with the laser light, and a second heating step of heating, after the first heating step, the sealing material at a temperature equal to or higher than the softening point of the sealing material or a temperature at which the sealing material softens and flows by irradiation with the laser light.