Automatic teaching of substrate handling for production and process-control tools

A substrate is to be loaded into an equipment front-end module of a fabrication or inspection tool. A first camera is situated on the substrate to image regions to a side of the substrate. A second camera is situated on the substrate to image regions below the substrate. One or more wireless transce...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	AIZEN, AMIR, MARK, SHAI, ARBIT, MAOR, SAFRANI, AVNER
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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