Automatic teaching of substrate handling for production and process-control tools
A substrate is to be loaded into an equipment front-end module of a fabrication or inspection tool. A first camera is situated on the substrate to image regions to a side of the substrate. A second camera is situated on the substrate to image regions below the substrate. One or more wireless transce...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | A substrate is to be loaded into an equipment front-end module of a fabrication or inspection tool. A first camera is situated on the substrate to image regions to a side of the substrate. A second camera is situated on the substrate to image regions below the substrate. One or more wireless transceivers on the substrate to transmit images captured by the first and second cameras. |
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