TWI849277B

The present invention provides a coating apparatus, a coating method, and a coating head management system. According to the present invention, the state of a coating head is appropriately managed. The coating apparatus (11) comprises: a holding table (21) for holding a substrate (70); a coating unit (coating head unit (22)) that coats a coating material on the substrate held by the holding table; and a control unit (50) that performs control such that the coating material is applied to a predetermined region of the substrate by moving the substrate and the coating unit relative to each other. The coating head (31) for coating a coating material on the substrate is detachably mounted on the coating part. The coating head has a storage unit (33) including a first storage area in which unique information of the coating head is stored, and a second storage area in which history information of the coating head is stored. The control unit reads the unique information from the first storage area, and stores the uni