TWI847715B
The present invention comprises: a processing container in which a substrate to be processed can be processed; a substrate mounting table on which the substrate to be processed can be placed; and a control unit capable of carrying out control such that when the temperature inside the processing cont...
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| Format: | Patent |
| Sprache: | chi |
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| Zusammenfassung: | The present invention comprises: a processing container in which a substrate to be processed can be processed; a substrate mounting table on which the substrate to be processed can be placed; and a control unit capable of carrying out control such that when the temperature inside the processing container after processing of the substrate to be processed is higher than the temperature for a cleaning process for cleaning the inside of the processing container, a cooling process for the inside of the processing container is carried out by placing, on the substrate mounting table, a cooling substrate that has a shorter outer perimeter length than the substrate to be processed, and when the temperature inside the processing container becomes a temperature at which the cleaning process can be carried out, the cleaning process is carried out. |
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