TWI842344B

Provided is a temperature control apparatus, comprising: a mounting unit including a mounting surface for mounting a board-shaped test object on which a plurality of devices are formed; a plurality of heaters provided for each of a plurality of zones into which the mounting surface is divided, which...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIKUCHI, ARITOMO, RANGANATHAN, KARTHIK
Format:	Patent
Sprache:	chi
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS REGULATING SEMICONDUCTOR DEVICES SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TESTING
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