TWI842344B

Provided is a temperature control apparatus, comprising: a mounting unit including a mounting surface for mounting a board-shaped test object on which a plurality of devices are formed; a plurality of heaters provided for each of a plurality of zones into which the mounting surface is divided, which heats corresponding one of the plurality of zones; a device temperature acquiring unit which acquires device temperature data according to a temperature measurement value in a device under test connected to a probe for an operation test among the plurality of devices of the test object; and a temperature control unit which controls two or more of the heaters corresponding to two or more of the zones on each of which at least part of the device under test is mounted, thereby closing a gap between a temperature indicated by the device temperature data and a first target temperature.