Micro-electro-mechanical system (mems) devices and fabrication methods thereof

Micro-electro-mechanical system (mems) devices and fabrication methods thereof

A micro-electro-mechanical system (MEMS) device includes a supporting substrate, a cavity disposed in the supporting substrate, a stopper, and a MEMS structure. The stopper is disposed between the supporting substrate and the cavity, and an inner sidewall of the stopper is in contact with the cavity...

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Hauptverfasser: CHAND, RAKESH, SOO, SOCK KUAN, SHUNMUGAM, MUNIANDY, YELEHANKA, RAMACHANDRAMURTHY PRADEEP
Format: Patent
Sprache:chi ; eng
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MANUFACTURE OR TREATMENT THEREOF
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS
NANOTECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
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creator CHAND, RAKESH
SOO, SOCK KUAN
SHUNMUGAM, MUNIANDY
YELEHANKA, RAMACHANDRAMURTHY PRADEEP
description A micro-electro-mechanical system (MEMS) device includes a supporting substrate, a cavity disposed in the supporting substrate, a stopper, and a MEMS structure. The stopper is disposed between the supporting substrate and the cavity, and an inner sidewall of the stopper is in contact with the cavity. The stopper includes a filling material surrounding a periphery of the cavity, and a liner wrapping around the filling material. The MEMS structure is disposed over the cavity and attached on the stopper and the supporting substrate.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_TWI841959BB</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>TWI841959BB</sourcerecordid><originalsourceid>FETCH-epo_espacenet_TWI841959BB3</originalsourceid><addsrcrecordid>eNqNyr0KwjAUBtAsDqK-wx116CAq2LWi6KBTwbFcky8kkJ-SGwTf3g4-gNNZzlw97l6X3CBA18kI7Th5zYHkIxWR1hFRNmTw9hpCnAxZfpWpVJ8TRVSXjVB1KMh2qWaWg2D1c6Hocu5P1wZjHiAjayTUoX_ejvtte2i7bvdH-QKyQjav</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Micro-electro-mechanical system (mems) devices and fabrication methods thereof</title><source>esp@cenet</source><creator>CHAND, RAKESH ; SOO, SOCK KUAN ; SHUNMUGAM, MUNIANDY ; YELEHANKA, RAMACHANDRAMURTHY PRADEEP</creator><creatorcontrib>CHAND, RAKESH ; SOO, SOCK KUAN ; SHUNMUGAM, MUNIANDY ; YELEHANKA, RAMACHANDRAMURTHY PRADEEP</creatorcontrib><description>A micro-electro-mechanical system (MEMS) device includes a supporting substrate, a cavity disposed in the supporting substrate, a stopper, and a MEMS structure. The stopper is disposed between the supporting substrate and the cavity, and an inner sidewall of the stopper is in contact with the cavity. The stopper includes a filling material surrounding a periphery of the cavity, and a liner wrapping around the filling material. The MEMS structure is disposed over the cavity and attached on the stopper and the supporting substrate.</description><language>chi ; eng</language><subject>MANUFACTURE OR TREATMENT THEREOF ; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS ; NANOTECHNOLOGY ; PERFORMING OPERATIONS ; TRANSPORTING</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20240511&amp;DB=EPODOC&amp;CC=TW&amp;NR=I841959B$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25547,76298</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20240511&amp;DB=EPODOC&amp;CC=TW&amp;NR=I841959B$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CHAND, RAKESH</creatorcontrib><creatorcontrib>SOO, SOCK KUAN</creatorcontrib><creatorcontrib>SHUNMUGAM, MUNIANDY</creatorcontrib><creatorcontrib>YELEHANKA, RAMACHANDRAMURTHY PRADEEP</creatorcontrib><title>Micro-electro-mechanical system (mems) devices and fabrication methods thereof</title><description>A micro-electro-mechanical system (MEMS) device includes a supporting substrate, a cavity disposed in the supporting substrate, a stopper, and a MEMS structure. The stopper is disposed between the supporting substrate and the cavity, and an inner sidewall of the stopper is in contact with the cavity. The stopper includes a filling material surrounding a periphery of the cavity, and a liner wrapping around the filling material. The MEMS structure is disposed over the cavity and attached on the stopper and the supporting substrate.</description><subject>MANUFACTURE OR TREATMENT THEREOF</subject><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS</subject><subject>NANOTECHNOLOGY</subject><subject>PERFORMING OPERATIONS</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyr0KwjAUBtAsDqK-wx116CAq2LWi6KBTwbFcky8kkJ-SGwTf3g4-gNNZzlw97l6X3CBA18kI7Th5zYHkIxWR1hFRNmTw9hpCnAxZfpWpVJ8TRVSXjVB1KMh2qWaWg2D1c6Hocu5P1wZjHiAjayTUoX_ejvtte2i7bvdH-QKyQjav</recordid><startdate>20240511</startdate><enddate>20240511</enddate><creator>CHAND, RAKESH</creator><creator>SOO, SOCK KUAN</creator><creator>SHUNMUGAM, MUNIANDY</creator><creator>YELEHANKA, RAMACHANDRAMURTHY PRADEEP</creator><scope>EVB</scope></search><sort><creationdate>20240511</creationdate><title>Micro-electro-mechanical system (mems) devices and fabrication methods thereof</title><author>CHAND, RAKESH ; SOO, SOCK KUAN ; SHUNMUGAM, MUNIANDY ; YELEHANKA, RAMACHANDRAMURTHY PRADEEP</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_TWI841959BB3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2024</creationdate><topic>MANUFACTURE OR TREATMENT THEREOF</topic><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS</topic><topic>NANOTECHNOLOGY</topic><topic>PERFORMING OPERATIONS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>CHAND, RAKESH</creatorcontrib><creatorcontrib>SOO, SOCK KUAN</creatorcontrib><creatorcontrib>SHUNMUGAM, MUNIANDY</creatorcontrib><creatorcontrib>YELEHANKA, RAMACHANDRAMURTHY PRADEEP</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CHAND, RAKESH</au><au>SOO, SOCK KUAN</au><au>SHUNMUGAM, MUNIANDY</au><au>YELEHANKA, RAMACHANDRAMURTHY PRADEEP</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Micro-electro-mechanical system (mems) devices and fabrication methods thereof</title><date>2024-05-11</date><risdate>2024</risdate><abstract>A micro-electro-mechanical system (MEMS) device includes a supporting substrate, a cavity disposed in the supporting substrate, a stopper, and a MEMS structure. The stopper is disposed between the supporting substrate and the cavity, and an inner sidewall of the stopper is in contact with the cavity. The stopper includes a filling material surrounding a periphery of the cavity, and a liner wrapping around the filling material. The MEMS structure is disposed over the cavity and attached on the stopper and the supporting substrate.</abstract><oa>free_for_read</oa></addata></record>
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source esp@cenet
subjects MANUFACTURE OR TREATMENT THEREOF
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS
NANOTECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
title Micro-electro-mechanical system (mems) devices and fabrication methods thereof
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-16T13%3A14%3A48IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=CHAND,%20RAKESH&rft.date=2024-05-11&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ETWI841959BB%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true