Micro-electro-mechanical system (mems) devices and fabrication methods thereof

Micro-electro-mechanical system (mems) devices and fabrication methods thereof

A micro-electro-mechanical system (MEMS) device includes a supporting substrate, a cavity disposed in the supporting substrate, a stopper, and a MEMS structure. The stopper is disposed between the supporting substrate and the cavity, and an inner sidewall of the stopper is in contact with the cavity...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHAND, RAKESH, SOO, SOCK KUAN, SHUNMUGAM, MUNIANDY, YELEHANKA, RAMACHANDRAMURTHY PRADEEP
Format: Patent
Sprache:chi ; eng
Schlagworte:
MANUFACTURE OR TREATMENT THEREOF
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS
NANOTECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
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Beschreibung
Zusammenfassung:A micro-electro-mechanical system (MEMS) device includes a supporting substrate, a cavity disposed in the supporting substrate, a stopper, and a MEMS structure. The stopper is disposed between the supporting substrate and the cavity, and an inner sidewall of the stopper is in contact with the cavity. The stopper includes a filling material surrounding a periphery of the cavity, and a liner wrapping around the filling material. The MEMS structure is disposed over the cavity and attached on the stopper and the supporting substrate.