Substrate processing apparatus

The present invention provides a substrate processing apparatus. A substrate processing apparatus (1) includes a first transport section (6a) and a second transport section (6b). The second transport section (6b) is located below the first transport section (6a). The first transport section (6a) inc...

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Hauptverfasser:	KAWAHARA, HIROYUKI, KIKUMOTO, NORIYUKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SEPARATION SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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creator	KAWAHARA, HIROYUKI KIKUMOTO, NORIYUKI
description	The present invention provides a substrate processing apparatus. A substrate processing apparatus (1) includes a first transport section (6a) and a second transport section (6b). The second transport section (6b) is located below the first transport section (6a). The first transport section (6a) includes a first transport space (61a), first transport FFUs (11 and 12), and a first floor section (71). The first transport FFUs (11 and 12) are located above the first transport space (61a). The first floor section (71) has a plurality of first through holes. The first floor section (71) is located below the first transport space (61a). The second transport section (6b) includes a second transport space (61b), second transport FFUs (13 and 14), a second floor section (72), and an exhaust fan (73). The second transport FFUs (13 and 14) are located below the first floor section (71). The second floor section (72) has a plurality of through holes. The second floor section (72) is located below the second transport spa
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The second transport section (6b) is located below the first transport section (6a). The first transport section (6a) includes a first transport space (61a), first transport FFUs (11 and 12), and a first floor section (71). The first transport FFUs (11 and 12) are located above the first transport space (61a). The first floor section (71) has a plurality of first through holes. The first floor section (71) is located below the first transport space (61a). The second transport section (6b) includes a second transport space (61b), second transport FFUs (13 and 14), a second floor section (72), and an exhaust fan (73). The second transport FFUs (13 and 14) are located below the first floor section (71). The second floor section (72) has a plurality of through holes. 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A substrate processing apparatus (1) includes a first transport section (6a) and a second transport section (6b). The second transport section (6b) is located below the first transport section (6a). The first transport section (6a) includes a first transport space (61a), first transport FFUs (11 and 12), and a first floor section (71). The first transport FFUs (11 and 12) are located above the first transport space (61a). The first floor section (71) has a plurality of first through holes. The first floor section (71) is located below the first transport space (61a). The second transport section (6b) includes a second transport space (61b), second transport FFUs (13 and 14), a second floor section (72), and an exhaust fan (73). The second transport FFUs (13 and 14) are located below the first floor section (71). The second floor section (72) has a plurality of through holes. 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subjects	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SEPARATION SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
title	Substrate processing apparatus
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