Substrate processing apparatus

Substrate processing apparatus

The present invention provides a substrate processing apparatus. A substrate processing apparatus (1) includes a first transport section (6a) and a second transport section (6b). The second transport section (6b) is located below the first transport section (6a). The first transport section (6a) inc...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KAWAHARA, HIROYUKI, KIKUMOTO, NORIYUKI
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SEPARATION
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Beschreibung
Zusammenfassung:The present invention provides a substrate processing apparatus. A substrate processing apparatus (1) includes a first transport section (6a) and a second transport section (6b). The second transport section (6b) is located below the first transport section (6a). The first transport section (6a) includes a first transport space (61a), first transport FFUs (11 and 12), and a first floor section (71). The first transport FFUs (11 and 12) are located above the first transport space (61a). The first floor section (71) has a plurality of first through holes. The first floor section (71) is located below the first transport space (61a). The second transport section (6b) includes a second transport space (61b), second transport FFUs (13 and 14), a second floor section (72), and an exhaust fan (73). The second transport FFUs (13 and 14) are located below the first floor section (71). The second floor section (72) has a plurality of through holes. The second floor section (72) is located below the second transport spa