TWI840654B
An extreme ultraviolet light source apparatus includes a cathode, an anode, an electric power supply, a first support structure made of metal for supporting the cathode, and a second support structure made of metal for supporting the anode. The electric power supply causes a discharge between the ca...
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| Format: | Patent |
| Sprache: | chi |
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| Zusammenfassung: | An extreme ultraviolet light source apparatus includes a cathode, an anode, an electric power supply, a first support structure made of metal for supporting the cathode, and a second support structure made of metal for supporting the anode. The electric power supply causes a discharge between the cathode and anode for generating a plasma that emits extreme ultraviolet light. The cathode is connected to the first rotational shaft made of metal, and the anode is connected to the second rotational shaft made of metal. The first support structure has a first support wall portion and a first tubular portion that surrounds the first rotational shaft. The second support structure has a second support wall portion and a second tubular portion that surrounds the second rotational shaft. The first and second support wall portions overlap each other. The first support wall portion has a through-hole through which the second tubular portion is inserted, or the second support wall portion has a through-hole through which |
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