WET PROCESS EQUIPMENT AND ROTARY CARRIER THEREFOR

A wet process equipment and a rotary carrier therefor. The wet process equipment has a sensing component, a jet device, a pressure regulating component, a sprinkler device, a body, a conveying unit and a controller. The sensing component is disposed in the body and a detected piece is disposed on ea...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HUANG, SHIH-DA, LU, LI-JUNG, WU, KUN-SHIN, SU, SHAOUN, SU, SHENG-YIH
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	A wet process equipment and a rotary carrier therefor. The wet process equipment has a sensing component, a jet device, a pressure regulating component, a sprinkler device, a body, a conveying unit and a controller. The sensing component is disposed in the body and a detected piece is disposed on each rotary carrier, and the controller is given a predetermined rotational speed, the controller can calculate a detected rotational speed of each rotary carrier, and then the controller compares the detected rotational speed with the predetermined rotational speed, and controls the pressure regulating component to adjust a fluid pressure in the jet device if the rotational speeds are different, so that the detected rotational speed of the rotary carrier is equal to the predetermined rotational speed. Therefore, the rotational speed of each rotary carrier can be adjusted.