TWI838597B
Provided is a polymer functioning as a leveling agent that imparts high smoothness to a coating film. Specifically, a polymer containing a polymer block (A1) of a polymerizable monomer (a1) having a functional group represented by -Si[OSi(R)3]n[R']3-n (n is an integer of 1 to 3, each R independ...
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Format: | Patent |
Sprache: | chi |
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Zusammenfassung: | Provided is a polymer functioning as a leveling agent that imparts high smoothness to a coating film. Specifically, a polymer containing a polymer block (A1) of a polymerizable monomer (a1) having a functional group represented by -Si[OSi(R)3]n[R']3-n (n is an integer of 1 to 3, each R independently represents an alkyl group having 1 to 3 carbon atoms, and each R' independently represents an alkyl group having 1 to 3 carbon atoms). Also provided are a coating composition, a resist composition, and an article containing the polymer. |
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