A component, method of manufacturing a component, and method of cleaning a component

A component, method of manufacturing a component, and method of cleaning a component

A component, a method of manufacturing a component, and a method of cleaning a component is provided. The component includes a gas flow system within the component, wherein the gas flow system fluidly couples one or more inlet holes and one or more outlet holes. The manufacturing of the component re...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RAJ, GOVINDA, NAIK, ARAVIND, KEPPERS, GARY, RODARTE, FRANCISCO, WIDLOW, IAN, GONDHALEKAR, SUDHIR, KODINAGANHALLI, RAVIKUMARA
Format: Patent
Sprache:chi ; eng
Schlagworte:
CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
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Beschreibung
Zusammenfassung:A component, a method of manufacturing a component, and a method of cleaning a component is provided. The component includes a gas flow system within the component, wherein the gas flow system fluidly couples one or more inlet holes and one or more outlet holes. The manufacturing of the component results in an arc shaped groove and a circumferential groove created in the body of the ring. The component undergoes one or more cleaning operations, including rinsing, baking, or purging operations. The cleaning operations remove debris or particles in or on the component, where the debris or particles can be caused during manufacturing of the component, or during use of the component in a semiconductor processing system.