Method for forming an electronic product comprising two capacitors having different dielectric thicknesses, and corresponding electronic product

A method for forming an electronic product comprising a first capacitor and a second capacitor, the electronic product comprising:- in a semi-conductor substrate (100), a bottom electrode region (101) of the first capacitor and a bottom electrode region of the second capacitor,- a first dielectric l...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: LALLEMAND, FLORENT, BOUVIER, STEPHANE
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A method for forming an electronic product comprising a first capacitor and a second capacitor, the electronic product comprising:- in a semi-conductor substrate (100), a bottom electrode region (101) of the first capacitor and a bottom electrode region of the second capacitor,- a first dielectric layer (106) having a first thickness arranged above the bottom electrode region of the first capacitor,- a second dielectric layer (108) having a second thickness arranged above the bottom electrode region of the second capacitor, the first thickness and the second thickness being different,- a top electrode region (111, 124) of the first capacitor arranged above the bottom electrode of the first capacitor and above the first dielectric layer,- a top electrode region (113, 125) of the second capacitor arranged above the bottom electrode of the second capacitor and above the second dielectric layer.