Method for forming an electronic product comprising two capacitors having different dielectric thicknesses, and corresponding electronic product
A method for forming an electronic product comprising a first capacitor and a second capacitor, the electronic product comprising:- in a semi-conductor substrate (100), a bottom electrode region (101) of the first capacitor and a bottom electrode region of the second capacitor,- a first dielectric l...
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Sprache: | chi ; eng |
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Zusammenfassung: | A method for forming an electronic product comprising a first capacitor and a second capacitor, the electronic product comprising:- in a semi-conductor substrate (100), a bottom electrode region (101) of the first capacitor and a bottom electrode region of the second capacitor,- a first dielectric layer (106) having a first thickness arranged above the bottom electrode region of the first capacitor,- a second dielectric layer (108) having a second thickness arranged above the bottom electrode region of the second capacitor, the first thickness and the second thickness being different,- a top electrode region (111, 124) of the first capacitor arranged above the bottom electrode of the first capacitor and above the first dielectric layer,- a top electrode region (113, 125) of the second capacitor arranged above the bottom electrode of the second capacitor and above the second dielectric layer. |
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