TWI835560B

The present invention provides a thermal field assembly, a single crystal furnace, a liquid leakage detection device and a method thereof. The thermal field assembly comprises: a bottom heater which comprises a top surface and a bottom surface opposite to each other, the bottom heater being provided with a first bolt hole passing through the top surface and the bottom surface; a tray-like bottom cover plate comprising a top plate surface and a bottom plate surface opposite to each other, the bottom heater being arranged on the top plate surface with its bottom surface in direct contact with the top plate surface, the bottom cover plate being made of insulating and high temperature-resistant material and being provided with a second bolt hole corresponding to the first bolt hole; and a bottom electrode arranged on one side of the bottom plate surface opposite to the top plate surface and passing through a fastening bolt disposed in the first bolt hole and the second bolt hole to be directly connected to the bo