TWI833929B

An objective of the present invention is to provide a processing device for preventing a workpiece from being ejected from a cassette or the workpiece from being returned in the processing device, or preventing the workpiece from being damaged. The processing device (2) at least includes components...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MANNAMI, HIDETOSHI, KAWAGOE, DAISUKE, EBISU, SHOGO
Format: Patent
Sprache:chi
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Beschreibung
Zusammenfassung:An objective of the present invention is to provide a processing device for preventing a workpiece from being ejected from a cassette or the workpiece from being returned in the processing device, or preventing the workpiece from being damaged. The processing device (2) at least includes components such as: a chuck table (4) for selectively holding at least two sizes of workpieces; a processing means (6) for processing the workpiece held in the chuck table (4); a cassette placement unit (10) disposed therein with a cassette (8) for accommodating a plurality of workpieces; an ejecting means (12) for ejecting the workpiece from the cassette (8) disposed in the cassette placement unit (10); a temporary placement means (14) wherein the workpiece ejected by the ejecting means (12) is temporarily disposed; and a conveyance means (16) for returning the workpiece temporarily disposed in the temporary placement means (14) to the chuck table (4). In addition, the processing device (2) includes a camera (88) for photogr