TWI830379B
Provided is an evaluation method of a semiconductor sample, the method including subjecting a semiconductor sample to be evaluated to measurement with a photoconductivity decay method to acquire a decay curve; subjecting the decay curve to signal data processing by a model expression including an ex...
Gespeichert in:
| Hauptverfasser: | , , |
|---|---|
| Format: | Patent |
| Sprache: | chi |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | Provided is an evaluation method of a semiconductor sample, the method including subjecting a semiconductor sample to be evaluated to measurement with a photoconductivity decay method to acquire a decay curve; subjecting the decay curve to signal data processing by a model expression including an exponential decay term and a constant term; and determining a recombination lifetime of the semiconductor sample from an expression of exponential decay obtained by the above signal data processing. |
|---|