Flood column and charged particle apparatus

Disclosed herein is a flood column for projecting a charged particle flooding beam along a beam path towards a sample to flood the sample with charged particles prior to assessment of the flooded sample using an assessment column, the flood column comprising: an anchor body (503) arranged along the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SCHEEPERS, PAUL HENDRICUS, MEIJER, JOSEPH REINIER, OTTEN, CHRISTIAAN, TEUNISSEN, CHRISTAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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