Flood column and charged particle apparatus

Disclosed herein is a flood column for projecting a charged particle flooding beam along a beam path towards a sample to flood the sample with charged particles prior to assessment of the flooded sample using an assessment column, the flood column comprising: an anchor body (503) arranged along the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SCHEEPERS, PAUL HENDRICUS, MEIJER, JOSEPH REINIER, OTTEN, CHRISTIAAN, TEUNISSEN, CHRISTAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:Disclosed herein is a flood column for projecting a charged particle flooding beam along a beam path towards a sample to flood the sample with charged particles prior to assessment of the flooded sample using an assessment column, the flood column comprising: an anchor body (503) arranged along the beam path; a lens arrangement (504, 505) arranged in a down-beam part of the flood column; and a lens support (502, 507) arranged between the anchor body and the lens arrangement; wherein the lens support is configured to position the lens arrangement and the anchor body relative to each other; the lens support comprises an electrical insulator; and the lens support is in the direct line of sight of at least a portion of the beam path in the down-beam part.