Flood column and charged particle apparatus
Disclosed herein is a flood column for projecting a charged particle flooding beam along a beam path towards a sample to flood the sample with charged particles prior to assessment of the flooded sample using an assessment column, the flood column comprising: an anchor body (503) arranged along the...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | Disclosed herein is a flood column for projecting a charged particle flooding beam along a beam path towards a sample to flood the sample with charged particles prior to assessment of the flooded sample using an assessment column, the flood column comprising: an anchor body (503) arranged along the beam path; a lens arrangement (504, 505) arranged in a down-beam part of the flood column; and a lens support (502, 507) arranged between the anchor body and the lens arrangement; wherein the lens support is configured to position the lens arrangement and the anchor body relative to each other; the lens support comprises an electrical insulator; and the lens support is in the direct line of sight of at least a portion of the beam path in the down-beam part. |
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