TWI827492B

[Problem] To achieve an increase in size and densification of a receptor substrate and shorten the tact time in a LIFT device while maintaining a high accuracy of the LIFT position. [Solution] A LIFT device is constructed with stage groups that move while holding a donor substrate with a LIFT sample...

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Bibliographische Detailangaben
Hauptverfasser:	YAMAOKA, HIROSHI, OZAWA, SHUSAKU, NAKADA, SATOKI
Format:	Patent
Sprache:	chi
Schlagworte:	BASIC ELECTRIC ELEMENTS CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	[Problem] To achieve an increase in size and densification of a receptor substrate and shorten the tact time in a LIFT device while maintaining a high accuracy of the LIFT position. [Solution] A LIFT device is constructed with stage groups that move while holding a donor substrate with a LIFT sample mounted thereon and/or a beam shaping optical system and a reduction projection optical system, and a stage group for supporting a receptor substrate that is a LIFT destination, formed on separate surface plates. Thereby, the LIFT device minimizes the vibration accompanying relative movement of each substrate with respect to laser light and anomalies in the accuracy of the synchronization position for the stages used for the movement.