Semiconductor device

A semiconductor device includes a substrate having an active region, a gate structure on the active region, the gate structure including a gate dielectric layer and a gate electrode layer, and the gate electrode layer having a rounded upper corner, and gate spacer layers on side surfaces of the gate...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM, JIN WOOK, BAE, DEOK HAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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