Load lock body portions, load lock apparatus, and methods for manufacturing the same

Load lock body portions, load lock apparatus, and methods for manufacturing the same

A load lock apparatus may include a body portion including one or more surfaces. A first groove may extend into and along a first surface of the one or more surfaces. A first tube may be received in the first groove, wherein the first tube may be configured to transport a liquid (e.g., to thermally...

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Bibliographische Detailangaben
Hauptverfasser: MOREY, TRAVIS, COSTUROS, THEODOSSIOS V, MALVIYA, RAM DAYAL, MADDHERLA, PANDU, NG, EDWARD, KUCHAR, MICHAEL C, GILJUM, RICHARD
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A load lock apparatus may include a body portion including one or more surfaces. A first groove may extend into and along a first surface of the one or more surfaces. A first tube may be received in the first groove, wherein the first tube may be configured to transport a liquid (e.g., to thermally control the body portion). Other apparatus and methods of manufacturing load lock apparatus in accordance with these and other embodiments are disclosed.