Three-dimensional integrated circuit and method for forming the same

Various embodiments of the present disclosure are directed towards a shared frontside pad/bridge layout for a three-dimensional (3D) integrated circuit (IC), as well as the 3D IC and a method for forming the 3D IC. A second IC die underlies the first IC die, and a third IC die underlies the second I...

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Bibliographische Detailangaben
Hauptverfasser: WU, WEI CHENG, HUANG, CHUNG-JEN, CHEN, PING-TZU, LIN, SHUN-KUAN, LIU, CHIEN LIN, HUANG, WEN-TUO, CHUANG, HARRY-HAKLAY, LIN, CHIA-SHENG, WU, WEI CHUANG, YANG, SHIHKUANG, TU, YUNG CHUN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:Various embodiments of the present disclosure are directed towards a shared frontside pad/bridge layout for a three-dimensional (3D) integrated circuit (IC), as well as the 3D IC and a method for forming the 3D IC. A second IC die underlies the first IC die, and a third IC die underlies the second IC die. A first-die backside pad, a second-die backside pad, and a third die backside pad are in a row extending in a dimension and overlie the first, second, and third IC dies. Further, the first-die, second-die, and third-die backside pads are electrically coupled respectively to individual semiconductor devices of the first, second, and third IC dies. The second and third IC dies include individual pad/bridge structures at top metal (TM) layers of corresponding interconnect structures. The pad/bridge structures share the shared frontside pad/bridge layout and provide lateral routing in the dimension for the aforementioned electrical coupling.