System for an extreme ultraviolet (euv) light source and method of forming a target for an euv light source

A system includes a spatial modulation device configured to interact with a light beam to create a modified light beam, the modified light beam including a spatial pattern of light that has a non-uniform intensity along a direction that is perpendicular to a direction of propagation of the modified...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	STINSON, CORY ALAN, ZHANG, KEVIN WEIMIN, PURVIS, MICHAEL ANTHONY
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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