TWI815413B

A test apparatus comprises a measuring part that measures a difference between an output value of each terminal in at least one terminal group having two or more terminals in which a plurality of terminals having a test device are grouped, and an output value of a reference terminal for each of the at least one terminal group among the plurality of terminals. The plurality of terminal groups form at least one chain relationship in which reference terminals are sequentially used between two or more terminal groups. The measurement part uses, as a reference terminal, any one terminal in the other terminal group for one terminal group, respectively, between two adjacent terminal groups in tje chain relationship.