TWI810429B

An objective of the present invention is to implement a highly precise cutting depth for a workpiece even though there is a variation in the height of a holding surface of a chuck table. A method for registering an origin point position of a cutting device comprises: a sheet holding step (ST1) of holding a dicing tape with a predetermined thickness on a holding surface of a chuck table; a cut mark forming step (ST2) of elevating a cutting unit by a predetermined distance in a Z-axis direction from a surface of the dicing tape in multiple XY coordinates of the chuck table to form a cut mark of a depth that does not completely cut the dicing tape with a cutting blade; and an origin point position registration step (ST3) of detecting the length of the plurality of cut marks for the XY coordinates by a camera unit, calculating the cut depth of the cut marks from the outer diameter of the cutting blade, and calculating an origin point position by corresponding the same to the XY coordinates from the cut depth and