TWI810250B

Disclosed is an electroplating apparatus for depositing metal on a substrate, which comprises a membrane frame, a catholyte inlet pipe and a center cap. The membrane frame has a center passage which passes through the center of the membrane frame. The catholyte inlet pipe is connected to the center...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: LU, CHEN-HUA, JIA, ZHAO-WEI, WANG, HUI, YANG, HONGAO, WANG, JIAN
Format: Patent
Sprache:chi
Schlagworte:
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