Structures for biochip

A structure for biochip is suitable for detecting a biological material in solution. The structure includes a substrate, a biological sensing mechanism, a dielectric layer, a gate electrode and a protective layer. The biological sensing mechanism is disposed on the substrate. The biological sensing...

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Bibliographische Detailangaben
Hauptverfasser:	LIU, CHIA LING, WANG, CHUN YAO, HSU, WEN TING, LI, KUO YU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A structure for biochip is suitable for detecting a biological material in solution. The structure includes a substrate, a biological sensing mechanism, a dielectric layer, a gate electrode and a protective layer. The biological sensing mechanism is disposed on the substrate. The biological sensing mechanism has a reaction region. The dielectric layer is disposed on the source electrode and the drain electrode and has a first opening. The gate electrode is disposed on the dielectric layer. The protective layer is disposed on the gate electrode and has a second opening. The second opening is provided corresponding to the first opening. The first opening exposes the reaction region. The second opening exposes the reaction region and a part of the gate electrode.