TWI809099B

The invention provides a technique applied for highly densifying the number of windings of a spiral antenna used for generation of inductively coupled plasma. The antenna according to the invention is an antenna for generation of inductively coupled plasma, and comprises a plurality of antenna struc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ABE, JUNICHI, NAKAO, HIROTO
Format:	Patent
Sprache:	chi
Schlagworte:	ANTENNAS, i.e. RADIO AERIALS BASIC ELECTRIC ELEMENTS CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention provides a technique applied for highly densifying the number of windings of a spiral antenna used for generation of inductively coupled plasma. The antenna according to the invention is an antenna for generation of inductively coupled plasma, and comprises a plurality of antenna structure members. Each of the plurality of antenna structure members is formed as a plate shape, and they are connected in series to constitute a polygonal spiral shape. Furthermore, for each two antenna structure members connected to each other in the plurality of antenna structure members, one is provided with a convex portion protruded along the plate surface direction and the other one is provided with a concave portion recessed along the plate surface direction, so that the concave portion and the convex portion may be combined and connected by brazing or welding.