TWI808748B

A wafer tray changing mechanism with a double-stroke conveyor device, comprises a tray device and a double-stroke conveyor device, wherein the wafer tray device includes a tray holding unit and a horizontal moving unit and a vertical moving unit that are arranged sequentially from top to bottom in the vertical direction. The tray holding unit is used to receive at least one tray and hold or release at least one tray, and the horizontal moving unit can reciprocate in the horizontal direction and hold or release at least one tray, the vertical moving unit can carry at least one tray and move the carried at least one tray in the vertical direction to a first position, a second position or a third position, and the double-stroke conveyor device. The double-stroke conveyor device is connected to the horizontal moving unit for driving the horizontal moving unit to move to the second position and a fourth position in the horizontal direction. In this way, the present invention enables stacking and changing of wafer