VACUUM PUMP CONTROLING METHOD AND VACUUM PROCESS SYSTEM

A vacuum pump controlling method applied to a vacuum process system is disclosed. The vacuum process system includes a vacuum pump and a processing machine which executes N-stage process and N is an integer. The vacuum pump includes a processor, a motor and a transmission unit. The vacuum pump is el...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	CHANG, CHIN-FA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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