VACUUM PUMP CONTROLING METHOD AND VACUUM PROCESS SYSTEM

A vacuum pump controlling method applied to a vacuum process system is disclosed. The vacuum process system includes a vacuum pump and a processing machine which executes N-stage process and N is an integer. The vacuum pump includes a processor, a motor and a transmission unit. The vacuum pump is electrically connected to the processing machine. The motor is used for extracting the air inside the processing machine. The vacuum pump controlling method includes: when the N-stage process of the processing machine is executed, the motor rotates at a standard speed; before the N-stage process is stopped and the N+1th stage process has not started, the processing machine sends a standby command to the vacuum pump; the vacuum pump receives and reduces the speed of the motor to a standby speed according to the standby command.