TWI806313B
The present invention relates to a batch type heat treatment furnace and a heat treatment furnace system capable of easily performing installation operation of a treatment table. The treatment table on which the object to be processed is placed can be attached to and detached from the lift bed of th...
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Format: | Patent |
Sprache: | chi |
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Zusammenfassung: | The present invention relates to a batch type heat treatment furnace and a heat treatment furnace system capable of easily performing installation operation of a treatment table. The treatment table on which the object to be processed is placed can be attached to and detached from the lift bed of the main body of the heat treatment furnace. When the treatment table is to be stopped from a state of rotating at the speed V1 in the normal direction, first, when a detection signal is output from the position sensor (YES in S12), the treatment table is further rotated in the forward rotation direction in the state of outputting the detection signal; and when the output detection signal stops (YES in S14), the rotation of the treatment table is stopped (S16). Next, the treatment table is rotated in the reverse direction at speed V2 (S18), and when a detection signal is output from the position sensor (YES in S20), the rotation of the treatment table in the reverse direction is stopped (S22). |
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