TWI805541B

The purpose of the present invention is to provide a photoresist stripping solution that has an excellent ability to maintain the solubility of a quaternary ammonium hydroxide and excellent temporal stability while maintaining a sufficient ability to strip resists. The present invention pertains to...

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Bibliographische Detailangaben
1. Verfasser: NISHIJIMA, YOSHITAKA
Format: Patent
Sprache:chi
Schlagworte:
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