Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films
Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes.
Gespeichert in:
| Hauptverfasser: | , , , , , , , , |
|---|---|
| Format: | Patent |
| Sprache: | chi ; eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | ROCHAT, RAPHAEL BLASCO, NICOLAS MARQUES-GONZALEZ, SANTIAGO WAN, ZHIWEN LANSALOT-MATRAS, CLEMENT ARTEAGA MULLER, ROCIO ALEJANDRA SANCHEZ, ANTONIO LEE, JOOHO GIRARD, JEAN-MARC |
| description | Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_TWI803641BB</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>TWI803641BB</sourcerecordid><originalsourceid>FETCH-epo_espacenet_TWI803641BB3</originalsourceid><addsrcrecordid>eNrjZChyL8ovLVAwUygpSswrzizJzM9TyE0tSczRTc7PK0nMzMvMS1dIzs8tyIdIFiuk5RcplCUWAMmUVJioQn6aQjoRBqVl5uQW8zCwpiXmFKfyQmluBgU31xBnD12gcfGpxQWJyal5qSXxIeGeFgbGZiaGTk7GRCgBANaeROM</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films</title><source>esp@cenet</source><creator>ROCHAT, RAPHAEL ; BLASCO, NICOLAS ; MARQUES-GONZALEZ, SANTIAGO ; WAN, ZHIWEN ; LANSALOT-MATRAS, CLEMENT ; ARTEAGA MULLER, ROCIO ALEJANDRA ; SANCHEZ, ANTONIO ; LEE, JOOHO ; GIRARD, JEAN-MARC</creator><creatorcontrib>ROCHAT, RAPHAEL ; BLASCO, NICOLAS ; MARQUES-GONZALEZ, SANTIAGO ; WAN, ZHIWEN ; LANSALOT-MATRAS, CLEMENT ; ARTEAGA MULLER, ROCIO ALEJANDRA ; SANCHEZ, ANTONIO ; LEE, JOOHO ; GIRARD, JEAN-MARC</creatorcontrib><description>Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes.</description><language>chi ; eng</language><subject>ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; ORGANIC CHEMISTRY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230601&DB=EPODOC&CC=TW&NR=I803641B$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25551,76302</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230601&DB=EPODOC&CC=TW&NR=I803641B$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ROCHAT, RAPHAEL</creatorcontrib><creatorcontrib>BLASCO, NICOLAS</creatorcontrib><creatorcontrib>MARQUES-GONZALEZ, SANTIAGO</creatorcontrib><creatorcontrib>WAN, ZHIWEN</creatorcontrib><creatorcontrib>LANSALOT-MATRAS, CLEMENT</creatorcontrib><creatorcontrib>ARTEAGA MULLER, ROCIO ALEJANDRA</creatorcontrib><creatorcontrib>SANCHEZ, ANTONIO</creatorcontrib><creatorcontrib>LEE, JOOHO</creatorcontrib><creatorcontrib>GIRARD, JEAN-MARC</creatorcontrib><title>Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films</title><description>Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes.</description><subject>ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>ORGANIC CHEMISTRY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZChyL8ovLVAwUygpSswrzizJzM9TyE0tSczRTc7PK0nMzMvMS1dIzs8tyIdIFiuk5RcplCUWAMmUVJioQn6aQjoRBqVl5uQW8zCwpiXmFKfyQmluBgU31xBnD12gcfGpxQWJyal5qSXxIeGeFgbGZiaGTk7GRCgBANaeROM</recordid><startdate>20230601</startdate><enddate>20230601</enddate><creator>ROCHAT, RAPHAEL</creator><creator>BLASCO, NICOLAS</creator><creator>MARQUES-GONZALEZ, SANTIAGO</creator><creator>WAN, ZHIWEN</creator><creator>LANSALOT-MATRAS, CLEMENT</creator><creator>ARTEAGA MULLER, ROCIO ALEJANDRA</creator><creator>SANCHEZ, ANTONIO</creator><creator>LEE, JOOHO</creator><creator>GIRARD, JEAN-MARC</creator><scope>EVB</scope></search><sort><creationdate>20230601</creationdate><title>Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films</title><author>ROCHAT, RAPHAEL ; BLASCO, NICOLAS ; MARQUES-GONZALEZ, SANTIAGO ; WAN, ZHIWEN ; LANSALOT-MATRAS, CLEMENT ; ARTEAGA MULLER, ROCIO ALEJANDRA ; SANCHEZ, ANTONIO ; LEE, JOOHO ; GIRARD, JEAN-MARC</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_TWI803641BB3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2023</creationdate><topic>ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>ORGANIC CHEMISTRY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>ROCHAT, RAPHAEL</creatorcontrib><creatorcontrib>BLASCO, NICOLAS</creatorcontrib><creatorcontrib>MARQUES-GONZALEZ, SANTIAGO</creatorcontrib><creatorcontrib>WAN, ZHIWEN</creatorcontrib><creatorcontrib>LANSALOT-MATRAS, CLEMENT</creatorcontrib><creatorcontrib>ARTEAGA MULLER, ROCIO ALEJANDRA</creatorcontrib><creatorcontrib>SANCHEZ, ANTONIO</creatorcontrib><creatorcontrib>LEE, JOOHO</creatorcontrib><creatorcontrib>GIRARD, JEAN-MARC</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>ROCHAT, RAPHAEL</au><au>BLASCO, NICOLAS</au><au>MARQUES-GONZALEZ, SANTIAGO</au><au>WAN, ZHIWEN</au><au>LANSALOT-MATRAS, CLEMENT</au><au>ARTEAGA MULLER, ROCIO ALEJANDRA</au><au>SANCHEZ, ANTONIO</au><au>LEE, JOOHO</au><au>GIRARD, JEAN-MARC</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films</title><date>2023-06-01</date><risdate>2023</risdate><abstract>Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | chi ; eng |
| recordid | cdi_epo_espacenet_TWI803641BB |
| source | esp@cenet |
| subjects | ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY ORGANIC CHEMISTRY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-15T20%3A46%3A52IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=ROCHAT,%20RAPHAEL&rft.date=2023-06-01&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ETWI803641BB%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |