Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films

Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes.

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Bibliographische Detailangaben
Hauptverfasser: ROCHAT, RAPHAEL, BLASCO, NICOLAS, MARQUES-GONZALEZ, SANTIAGO, WAN, ZHIWEN, LANSALOT-MATRAS, CLEMENT, ARTEAGA MULLER, ROCIO ALEJANDRA, SANCHEZ, ANTONIO, LEE, JOOHO, GIRARD, JEAN-MARC
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes.