Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films
Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes.
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Hauptverfasser: | , , , , , , , , |
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes. |
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