Apparatus and method for determining a condition associated with a pellicle and related pellicle assembly

An apparatus for determining a condition associated with a pellicle for use in a lithographic apparatus, the apparatus including a sensor, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of the pellicle condition.

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Bibliographische Detailangaben
Hauptverfasser:	VAN DE KERKHOF, MARCUS ADRIANUS, XIONG, XUGANG, KOTTAPALLI, VEERA VENKATA NARASIMHA NARENDRA PHANI, LYONS, JOSEPH HARRY, RANJAN, MANISH, MODDERMAN, THEODORUS MARINUS, JUDGE, ANDREW, JACOBS, RICHARD, BROUNS, DERK SERVATIUS GERTRUDA, ADAMS, JOSHUA, BENDIKSEN, AAGE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	An apparatus for determining a condition associated with a pellicle for use in a lithographic apparatus, the apparatus including a sensor, wherein the sensor is configured to measure a property associated with the pellicle, the property being indicative of the pellicle condition.