TWI801893B

A defect inspection device includes an ultrasonic probe, an image acquirer, a calculator, and a corrector. The ultrasonic probe acquires an ultrasonic image of an inspection object or a simulated inspection object. The image acquirer acquires an infrared image including a first region of the simulat...

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Bibliographische Detailangaben
1. Verfasser:	TAMURA, HIRONOBU
Format:	Patent
Sprache:	chi
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	A defect inspection device includes an ultrasonic probe, an image acquirer, a calculator, and a corrector. The ultrasonic probe acquires an ultrasonic image of an inspection object or a simulated inspection object. The image acquirer acquires an infrared image including a first region of the simulated inspection object or a second region of the inspection object. The calculator calculates a first correction value for correcting a coordinate deviation of the first region in the ultrasonic image and the infrared image with respect to a designed coordinate of the first region, or calculate a second correction value for correcting a coordinate deviation of the second region in the infrared image with respect to a designed coordinate of the second region. The corrector performs coordinate correction with the calculated first or second correction value for the ultrasonic image of the inspection object.